7/4/2012	12:02:59 AM	Helium valve closed
7/4/2012	12:02:59 AM	H2 valve closed
7/4/2012	12:02:59 AM	BCl3 valve closed
7/4/2012	12:02:59 AM	PH3 valve closed
7/4/2012	12:02:59 AM	SiCl4 pre valve closed
7/4/2012	12:02:59 AM	SiCl4 post valve closed
7/4/2012	12:02:59 AM	Main Vac valve closed
7/4/2012	12:02:59 AM	Bypass valve closed
7/4/2012	12:02:59 AM	Bubbler valve closed
7/4/2012	12:02:59 AM	Helium MFC set to  0.000000
7/4/2012	12:02:59 AM	H2 MFC set to  0.000000
7/4/2012	12:02:59 AM	BCl3 MFC set to  0.000000
7/4/2012	12:02:59 AM	PH3 MFC set to  0.000000
7/4/2012	12:02:59 AM	SiCl4 MFC set to  0.000000
7/4/2012	12:02:59 AM	Bypass solenoid MFC set to  0.000000
7/4/2012	12:02:59 AM	Tube furnace set to 0
7/4/2012	12:22:59 AM	Helium valve closed
7/4/2012	12:22:59 AM	H2 valve closed
7/4/2012	12:22:59 AM	BCl3 valve closed
7/4/2012	12:22:59 AM	PH3 valve closed
7/4/2012	12:22:59 AM	SiCl4 pre valve closed
7/4/2012	12:22:59 AM	SiCl4 post valve closed
7/4/2012	12:22:59 AM	Main Vac valve closed
7/4/2012	12:22:59 AM	Bubbler valve closed
7/4/2012	12:22:59 AM	Bypass valve opened
7/4/2012	12:22:59 AM	Helium MFC set to  0.000000
7/4/2012	12:22:59 AM	H2 MFC set to  0.000000
7/4/2012	12:22:59 AM	BCl3 MFC set to  0.000000
7/4/2012	12:22:59 AM	PH3 MFC set to  0.000000
7/4/2012	12:22:59 AM	SiCl4 MFC set to  0.000000
7/4/2012	12:22:59 AM	Bypass solenoid MFC set to  0.000000
7/4/2012	12:22:59 AM	Tube furnace set to 0
7/4/2012	12:23:49 AM	Helium valve closed
7/4/2012	12:23:49 AM	H2 valve closed
7/4/2012	12:23:49 AM	BCl3 valve closed
7/4/2012	12:23:49 AM	PH3 valve closed
7/4/2012	12:23:49 AM	SiCl4 pre valve closed
7/4/2012	12:23:49 AM	SiCl4 post valve closed
7/4/2012	12:23:49 AM	Main Vac valve closed
7/4/2012	12:23:49 AM	Bubbler valve closed
7/4/2012	12:23:49 AM	Bypass valve opened
7/4/2012	12:23:49 AM	Helium MFC set to  0.000000
7/4/2012	12:23:49 AM	H2 MFC set to  0.000000
7/4/2012	12:23:49 AM	BCl3 MFC set to  0.000000
7/4/2012	12:23:49 AM	PH3 MFC set to  0.000000
7/4/2012	12:23:49 AM	SiCl4 MFC set to  0.000000
7/4/2012	12:23:49 AM	Bypass solenoid MFC set to  0.000000
7/4/2012	12:23:49 AM	Tube furnace set to 0
7/4/2012	12:24:49 AM	Helium valve closed
7/4/2012	12:24:49 AM	H2 valve closed
7/4/2012	12:24:49 AM	BCl3 valve closed
7/4/2012	12:24:49 AM	PH3 valve closed
7/4/2012	12:24:49 AM	SiCl4 pre valve closed
7/4/2012	12:24:49 AM	SiCl4 post valve closed
7/4/2012	12:24:49 AM	Bypass valve closed
7/4/2012	12:24:49 AM	Bubbler valve closed
7/4/2012	12:24:49 AM	Main Vac valve opened
7/4/2012	12:24:49 AM	Helium MFC set to  0.000000
7/4/2012	12:24:49 AM	H2 MFC set to  0.000000
7/4/2012	12:24:49 AM	BCl3 MFC set to  0.000000
7/4/2012	12:24:49 AM	PH3 MFC set to  0.000000
7/4/2012	12:24:49 AM	SiCl4 MFC set to  0.000000
7/4/2012	12:24:49 AM	Bypass solenoid MFC set to  0.000000
7/4/2012	12:24:50 AM	Tube furnace set to 0
7/4/2012	1:24:50 AM	Run finished at 1:24 AM
7/4/2012	8:32:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/4/2012	8:32:11 AM	Recipe started at 8:32 AM
7/4/2012	8:32:12 AM	Helium valve closed
7/4/2012	8:32:12 AM	H2 valve closed
7/4/2012	8:32:12 AM	BCl3 valve closed
7/4/2012	8:32:12 AM	PH3 valve closed
7/4/2012	8:32:12 AM	SiCl4 pre valve closed
7/4/2012	8:32:12 AM	SiCl4 post valve closed
7/4/2012	8:32:12 AM	Main Vac valve closed
7/4/2012	8:32:12 AM	Bypass valve closed
7/4/2012	8:32:12 AM	Bubbler valve closed
7/4/2012	8:32:12 AM	Helium MFC set to  0.000000
7/4/2012	8:32:12 AM	H2 MFC set to  0.000000
7/4/2012	8:32:12 AM	BCl3 MFC set to  0.000000
7/4/2012	8:32:12 AM	PH3 MFC set to  0.000000
7/4/2012	8:32:12 AM	SiCl4 MFC set to  0.000000
7/4/2012	8:32:12 AM	Bypass solenoid MFC set to  0.000000
7/4/2012	8:32:12 AM	Tube furnace set to 0
7/4/2012	8:32:15 AM	H2 valve closed
7/4/2012	8:32:15 AM	BCl3 valve closed
7/4/2012	8:32:15 AM	PH3 valve closed
7/4/2012	8:32:15 AM	SiCl4 pre valve closed
7/4/2012	8:32:15 AM	SiCl4 post valve closed
7/4/2012	8:32:15 AM	Main Vac valve closed
7/4/2012	8:32:15 AM	Bypass valve closed
7/4/2012	8:32:15 AM	Bubbler valve closed
7/4/2012	8:32:15 AM	Helium valve opened
7/4/2012	8:32:15 AM	Helium MFC set to  500.000000
7/4/2012	8:32:15 AM	H2 MFC set to  0.000000
7/4/2012	8:32:15 AM	BCl3 MFC set to  0.000000
7/4/2012	8:32:15 AM	PH3 MFC set to  0.000000
7/4/2012	8:32:15 AM	SiCl4 MFC set to  0.000000
7/4/2012	8:32:15 AM	Bypass solenoid MFC set to  0.000000
7/4/2012	8:32:15 AM	Tube furnace set to 0
7/4/2012	8:33:27 AM	Helium valve closed
7/4/2012	8:33:27 AM	H2 valve closed
7/4/2012	8:33:27 AM	BCl3 valve closed
7/4/2012	8:33:27 AM	PH3 valve closed
7/4/2012	8:33:27 AM	SiCl4 pre valve closed
7/4/2012	8:33:27 AM	SiCl4 post valve closed
7/4/2012	8:33:27 AM	Main Vac valve closed
7/4/2012	8:33:28 AM	Bypass valve closed
7/4/2012	8:33:28 AM	Bubbler valve closed
7/4/2012	8:33:28 AM	Helium MFC set to  0.000000
7/4/2012	8:33:28 AM	H2 MFC set to  0.000000
7/4/2012	8:33:28 AM	BCl3 MFC set to  0.000000
7/4/2012	8:33:28 AM	PH3 MFC set to  0.000000
7/4/2012	8:33:28 AM	SiCl4 MFC set to  0.000000
7/4/2012	8:33:28 AM	Bypass solenoid MFC set to  0.000000
7/4/2012	8:33:28 AM	Tube furnace set to 0
7/4/2012	8:33:29 AM	Run finished at 8:33 AM
7/4/2012	8:33:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/4/2012	8:37:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/4/2012	8:37:56 AM	Recipe started at 8:37 AM
7/4/2012	8:37:56 AM	Helium valve closed
7/4/2012	8:37:56 AM	H2 valve closed
7/4/2012	8:37:56 AM	BCl3 valve closed
7/4/2012	8:37:56 AM	PH3 valve closed
7/4/2012	8:37:56 AM	SiCl4 pre valve closed
7/4/2012	8:37:56 AM	SiCl4 post valve closed
7/4/2012	8:37:56 AM	Main Vac valve closed
7/4/2012	8:37:56 AM	Bubbler valve closed
7/4/2012	8:37:56 AM	Bypass valve opened
7/4/2012	8:37:56 AM	Helium MFC set to  0.000000
7/4/2012	8:37:56 AM	H2 MFC set to  0.000000
7/4/2012	8:37:56 AM	BCl3 MFC set to  0.000000
7/4/2012	8:37:56 AM	PH3 MFC set to  0.000000
7/4/2012	8:37:56 AM	SiCl4 MFC set to  0.000000
7/4/2012	8:37:56 AM	Bypass solenoid MFC set to  0.000000
7/4/2012	8:37:56 AM	Tube furnace set to 0
7/4/2012	8:39:07 AM	Helium valve closed
7/4/2012	8:39:07 AM	H2 valve closed
7/4/2012	8:39:07 AM	BCl3 valve closed
7/4/2012	8:39:07 AM	PH3 valve closed
7/4/2012	8:39:07 AM	SiCl4 pre valve closed
7/4/2012	8:39:07 AM	SiCl4 post valve closed
7/4/2012	8:39:07 AM	Main Vac valve closed
7/4/2012	8:39:07 AM	Bubbler valve closed
7/4/2012	8:39:07 AM	Bypass valve opened
7/4/2012	8:39:07 AM	Helium MFC set to  0.000000
7/4/2012	8:39:07 AM	H2 MFC set to  0.000000
7/4/2012	8:39:07 AM	BCl3 MFC set to  0.000000
7/4/2012	8:39:07 AM	PH3 MFC set to  0.000000
7/4/2012	8:39:07 AM	SiCl4 MFC set to  0.000000
7/4/2012	8:39:07 AM	Bypass solenoid MFC set to  0.000000
7/4/2012	8:39:07 AM	Tube furnace set to 0
7/4/2012	8:40:07 AM	Helium valve closed
7/4/2012	8:40:07 AM	H2 valve closed
7/4/2012	8:40:07 AM	BCl3 valve closed
7/4/2012	8:40:07 AM	PH3 valve closed
7/4/2012	8:40:07 AM	SiCl4 pre valve closed
7/4/2012	8:40:07 AM	SiCl4 post valve closed
7/4/2012	8:40:07 AM	Bypass valve closed
7/4/2012	8:40:07 AM	Bubbler valve closed
7/4/2012	8:40:07 AM	Main Vac valve opened
7/4/2012	8:40:07 AM	Helium MFC set to  0.000000
7/4/2012	8:40:07 AM	H2 MFC set to  0.000000
7/4/2012	8:40:07 AM	BCl3 MFC set to  0.000000
7/4/2012	8:40:07 AM	PH3 MFC set to  0.000000
7/4/2012	8:40:07 AM	SiCl4 MFC set to  0.000000
7/4/2012	8:40:07 AM	Bypass solenoid MFC set to  0.000000
7/4/2012	8:40:07 AM	Tube furnace set to 0
7/4/2012	8:40:08 AM	Run finished at 8:40 AM
7/4/2012	8:40:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/4/2012	8:41:22 AM	Recipe started at 8:41 AM
7/4/2012	8:41:22 AM	Helium valve closed
7/4/2012	8:41:22 AM	H2 valve closed
7/4/2012	8:41:22 AM	BCl3 valve closed
7/4/2012	8:41:22 AM	PH3 valve closed
7/4/2012	8:41:22 AM	SiCl4 pre valve closed
7/4/2012	8:41:22 AM	SiCl4 post valve closed
7/4/2012	8:41:22 AM	Bypass valve closed
7/4/2012	8:41:22 AM	Bubbler valve closed
7/4/2012	8:41:22 AM	Main Vac valve opened
7/4/2012	8:41:22 AM	Helium MFC set to  0.000000
7/4/2012	8:41:22 AM	H2 MFC set to  0.000000
7/4/2012	8:41:22 AM	BCl3 MFC set to  0.000000
7/4/2012	8:41:22 AM	PH3 MFC set to  0.000000
7/4/2012	8:41:22 AM	SiCl4 MFC set to  0.000000
7/4/2012	8:41:22 AM	Bypass solenoid MFC set to  0.000000
7/4/2012	8:41:22 AM	Tube furnace set to 0
7/4/2012	10:11:22 AM	Helium valve closed
7/4/2012	10:11:22 AM	H2 valve closed
7/4/2012	10:11:22 AM	BCl3 valve closed
7/4/2012	10:11:22 AM	PH3 valve closed
7/4/2012	10:11:22 AM	SiCl4 pre valve closed
7/4/2012	10:11:22 AM	SiCl4 post valve closed
7/4/2012	10:11:22 AM	Main Vac valve closed
7/4/2012	10:11:22 AM	Bypass valve closed
7/4/2012	10:11:22 AM	Bubbler valve closed
7/4/2012	10:11:22 AM	Helium MFC set to  0.000000
7/4/2012	10:11:22 AM	H2 MFC set to  0.000000
7/4/2012	10:11:22 AM	BCl3 MFC set to  0.000000
7/4/2012	10:11:22 AM	PH3 MFC set to  0.000000
7/4/2012	10:11:22 AM	SiCl4 MFC set to  0.000000
7/4/2012	10:11:22 AM	Bypass solenoid MFC set to  0.000000
7/4/2012	10:11:22 AM	Tube furnace set to 0
7/4/2012	10:11:25 AM	Helium valve closed
7/4/2012	10:11:25 AM	BCl3 valve closed
7/4/2012	10:11:25 AM	PH3 valve closed
7/4/2012	10:11:25 AM	SiCl4 pre valve closed
7/4/2012	10:11:25 AM	SiCl4 post valve closed
7/4/2012	10:11:25 AM	Main Vac valve closed
7/4/2012	10:11:25 AM	Bypass valve closed
7/4/2012	10:11:25 AM	Bubbler valve closed
7/4/2012	10:11:25 AM	H2 valve opened
7/4/2012	10:11:25 AM	Helium MFC set to  0.000000
7/4/2012	10:11:25 AM	H2 MFC set to  500.000000
7/4/2012	10:11:25 AM	BCl3 MFC set to  0.000000
7/4/2012	10:11:25 AM	PH3 MFC set to  0.000000
7/4/2012	10:11:25 AM	SiCl4 MFC set to  0.000000
7/4/2012	10:11:25 AM	Bypass solenoid MFC set to  0.000000
7/4/2012	10:11:25 AM	Tube furnace set to 0
7/4/2012	10:12:41 AM	Helium valve closed
7/4/2012	10:12:41 AM	BCl3 valve closed
7/4/2012	10:12:41 AM	PH3 valve closed
7/4/2012	10:12:41 AM	SiCl4 pre valve closed
7/4/2012	10:12:41 AM	SiCl4 post valve closed
7/4/2012	10:12:41 AM	Main Vac valve closed
7/4/2012	10:12:41 AM	Bypass valve closed
7/4/2012	10:12:41 AM	H2 valve opened
7/4/2012	10:12:41 AM	Bubbler valve opened
7/4/2012	10:12:41 AM	Helium MFC set to  0.000000
7/4/2012	10:12:41 AM	H2 MFC set to  500.000000
7/4/2012	10:12:41 AM	BCl3 MFC set to  0.000000
7/4/2012	10:12:41 AM	PH3 MFC set to  0.000000
7/4/2012	10:12:41 AM	SiCl4 MFC set to  0.000000
7/4/2012	10:12:41 AM	Bypass solenoid MFC set to  0.000000
7/4/2012	10:12:41 AM	Tube furnace set to 0
7/4/2012	10:12:42 AM	Helium valve closed
7/4/2012	10:12:42 AM	BCl3 valve closed
7/4/2012	10:12:43 AM	PH3 valve closed
7/4/2012	10:12:43 AM	SiCl4 pre valve closed
7/4/2012	10:12:43 AM	SiCl4 post valve closed
7/4/2012	10:12:43 AM	Main Vac valve closed
7/4/2012	10:12:43 AM	Bypass valve closed
7/4/2012	10:12:43 AM	H2 valve opened
7/4/2012	10:12:43 AM	Bubbler valve opened
7/4/2012	10:12:43 AM	Helium MFC set to  0.000000
7/4/2012	10:12:43 AM	H2 MFC set to  500.000000
7/4/2012	10:12:43 AM	BCl3 MFC set to  0.000000
7/4/2012	10:12:43 AM	PH3 MFC set to  0.000000
7/4/2012	10:12:43 AM	SiCl4 MFC set to  0.000000
7/4/2012	10:12:43 AM	Bypass solenoid MFC set to  0.000000
7/4/2012	10:12:43 AM	Tube furnace set to 1000
7/4/2012	10:37:43 AM	Helium valve closed
7/4/2012	10:37:43 AM	PH3 valve closed
7/4/2012	10:37:43 AM	Main Vac valve closed
7/4/2012	10:37:43 AM	Bypass valve closed
7/4/2012	10:37:43 AM	H2 valve opened
7/4/2012	10:37:43 AM	BCl3 valve opened
7/4/2012	10:37:43 AM	SiCl4 pre valve opened
7/4/2012	10:37:43 AM	SiCl4 post valve opened
7/4/2012	10:37:43 AM	Bubbler valve opened
7/4/2012	10:37:43 AM	Helium MFC set to  0.000000
7/4/2012	10:37:43 AM	H2 MFC set to  450.000000
7/4/2012	10:37:43 AM	BCl3 MFC set to  1.000000
7/4/2012	10:37:43 AM	PH3 MFC set to  0.000000
7/4/2012	10:37:43 AM	SiCl4 MFC set to  50.000000
7/4/2012	10:37:43 AM	Bypass solenoid MFC set to  0.000000
7/4/2012	10:37:43 AM	Tube furnace set to 1000
7/4/2012	11:05:43 AM	Helium valve closed
7/4/2012	11:05:43 AM	BCl3 valve closed
7/4/2012	11:05:43 AM	PH3 valve closed
7/4/2012	11:05:43 AM	SiCl4 pre valve closed
7/4/2012	11:05:43 AM	SiCl4 post valve closed
7/4/2012	11:05:43 AM	Main Vac valve closed
7/4/2012	11:05:43 AM	Bypass valve closed
7/4/2012	11:05:43 AM	H2 valve opened
7/4/2012	11:05:43 AM	Bubbler valve opened
7/4/2012	11:05:43 AM	Helium MFC set to  0.000000
7/4/2012	11:05:43 AM	H2 MFC set to  500.000000
7/4/2012	11:05:43 AM	BCl3 MFC set to  0.000000
7/4/2012	11:05:43 AM	PH3 MFC set to  0.000000
7/4/2012	11:05:43 AM	SiCl4 MFC set to  0.000000
7/4/2012	11:05:43 AM	Bypass solenoid MFC set to  0.000000
7/4/2012	11:05:43 AM	Tube furnace set to 750
7/4/2012	11:20:43 AM	H2 valve closed
7/4/2012	11:20:43 AM	BCl3 valve closed
7/4/2012	11:20:43 AM	PH3 valve closed
7/4/2012	11:20:43 AM	SiCl4 pre valve closed
7/4/2012	11:20:43 AM	SiCl4 post valve closed
7/4/2012	11:20:43 AM	Main Vac valve closed
7/4/2012	11:20:43 AM	Bypass valve closed
7/4/2012	11:20:43 AM	Helium valve opened
7/4/2012	11:20:43 AM	Bubbler valve opened
7/4/2012	11:20:43 AM	Helium MFC set to  500.000000
7/4/2012	11:20:43 AM	H2 MFC set to  0.000000
7/4/2012	11:20:43 AM	BCl3 MFC set to  0.000000
7/4/2012	11:20:43 AM	PH3 MFC set to  0.000000
7/4/2012	11:20:43 AM	SiCl4 MFC set to  0.000000
7/4/2012	11:20:43 AM	Bypass solenoid MFC set to  0.000000
7/4/2012	11:20:43 AM	Tube furnace set to 0
7/4/2012	11:40:43 AM	Helium valve closed
7/4/2012	11:40:43 AM	H2 valve closed
7/4/2012	11:40:43 AM	BCl3 valve closed
7/4/2012	11:40:43 AM	PH3 valve closed
7/4/2012	11:40:43 AM	SiCl4 pre valve closed
7/4/2012	11:40:43 AM	SiCl4 post valve closed
7/4/2012	11:40:43 AM	Main Vac valve closed
7/4/2012	11:40:43 AM	Bypass valve closed
7/4/2012	11:40:43 AM	Bubbler valve closed
7/4/2012	11:40:43 AM	Helium MFC set to  0.000000
7/4/2012	11:40:43 AM	H2 MFC set to  0.000000
7/4/2012	11:40:43 AM	BCl3 MFC set to  0.000000
7/4/2012	11:40:43 AM	PH3 MFC set to  0.000000
7/4/2012	11:40:43 AM	SiCl4 MFC set to  0.000000
7/4/2012	11:40:43 AM	Bypass solenoid MFC set to  0.000000
7/4/2012	11:40:43 AM	Tube furnace set to 0
7/4/2012	12:00:43 PM	Helium valve closed
7/4/2012	12:00:43 PM	H2 valve closed
7/4/2012	12:00:43 PM	BCl3 valve closed
7/4/2012	12:00:43 PM	PH3 valve closed
7/4/2012	12:00:43 PM	SiCl4 pre valve closed
7/4/2012	12:00:43 PM	SiCl4 post valve closed
7/4/2012	12:00:43 PM	Main Vac valve closed
7/4/2012	12:00:43 PM	Bubbler valve closed
7/4/2012	12:00:43 PM	Bypass valve opened
7/4/2012	12:00:43 PM	Helium MFC set to  0.000000
7/4/2012	12:00:44 PM	H2 MFC set to  0.000000
7/4/2012	12:00:44 PM	BCl3 MFC set to  0.000000
7/4/2012	12:00:44 PM	PH3 MFC set to  0.000000
7/4/2012	12:00:44 PM	SiCl4 MFC set to  0.000000
7/4/2012	12:00:44 PM	Bypass solenoid MFC set to  0.000000
7/4/2012	12:00:44 PM	Tube furnace set to 0
7/4/2012	12:01:36 PM	Helium valve closed
7/4/2012	12:01:36 PM	H2 valve closed
7/4/2012	12:01:36 PM	BCl3 valve closed
7/4/2012	12:01:36 PM	PH3 valve closed
7/4/2012	12:01:36 PM	SiCl4 pre valve closed
7/4/2012	12:01:36 PM	SiCl4 post valve closed
7/4/2012	12:01:36 PM	Main Vac valve closed
7/4/2012	12:01:36 PM	Bubbler valve closed
7/4/2012	12:01:36 PM	Bypass valve opened
7/4/2012	12:01:36 PM	Helium MFC set to  0.000000
7/4/2012	12:01:36 PM	H2 MFC set to  0.000000
7/4/2012	12:01:36 PM	BCl3 MFC set to  0.000000
7/4/2012	12:01:36 PM	PH3 MFC set to  0.000000
7/4/2012	12:01:36 PM	SiCl4 MFC set to  0.000000
7/4/2012	12:01:36 PM	Bypass solenoid MFC set to  0.000000
7/4/2012	12:01:37 PM	Tube furnace set to 0
7/4/2012	12:02:36 PM	Helium valve closed
7/4/2012	12:02:36 PM	H2 valve closed
7/4/2012	12:02:36 PM	BCl3 valve closed
7/4/2012	12:02:36 PM	PH3 valve closed
7/4/2012	12:02:36 PM	SiCl4 pre valve closed
7/4/2012	12:02:36 PM	SiCl4 post valve closed
7/4/2012	12:02:36 PM	Bypass valve closed
7/4/2012	12:02:36 PM	Bubbler valve closed
7/4/2012	12:02:36 PM	Main Vac valve opened
7/4/2012	12:02:36 PM	Helium MFC set to  0.000000
7/4/2012	12:02:36 PM	H2 MFC set to  0.000000
7/4/2012	12:02:36 PM	BCl3 MFC set to  0.000000
7/4/2012	12:02:36 PM	PH3 MFC set to  0.000000
7/4/2012	12:02:36 PM	SiCl4 MFC set to  0.000000
7/4/2012	12:02:36 PM	Bypass solenoid MFC set to  0.000000
7/4/2012	12:02:36 PM	Tube furnace set to 0
7/4/2012	12:14:53 PM	Run finished at 12:14 PM
7/4/2012	12:14:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/4/2012	12:14:59 PM	Recipe started at 12:14 PM
7/4/2012	12:14:59 PM	Helium valve closed
7/4/2012	12:14:59 PM	H2 valve closed
7/4/2012	12:14:59 PM	BCl3 valve closed
7/4/2012	12:14:59 PM	PH3 valve closed
7/4/2012	12:14:59 PM	SiCl4 pre valve closed
7/4/2012	12:14:59 PM	SiCl4 post valve closed
7/4/2012	12:14:59 PM	Main Vac valve closed
7/4/2012	12:14:59 PM	Bypass valve closed
7/4/2012	12:14:59 PM	Bubbler valve closed
7/4/2012	12:14:59 PM	Helium MFC set to  0.000000
7/4/2012	12:14:59 PM	H2 MFC set to  0.000000
7/4/2012	12:14:59 PM	BCl3 MFC set to  0.000000
7/4/2012	12:14:59 PM	PH3 MFC set to  0.000000
7/4/2012	12:14:59 PM	SiCl4 MFC set to  0.000000
7/4/2012	12:14:59 PM	Bypass solenoid MFC set to  0.000000
7/4/2012	12:14:59 PM	Tube furnace set to 0
7/4/2012	12:15:02 PM	H2 valve closed
7/4/2012	12:15:02 PM	BCl3 valve closed
7/4/2012	12:15:02 PM	PH3 valve closed
7/4/2012	12:15:02 PM	SiCl4 pre valve closed
7/4/2012	12:15:02 PM	SiCl4 post valve closed
7/4/2012	12:15:02 PM	Main Vac valve closed
7/4/2012	12:15:02 PM	Bypass valve closed
7/4/2012	12:15:02 PM	Bubbler valve closed
7/4/2012	12:15:02 PM	Helium valve opened
7/4/2012	12:15:02 PM	Helium MFC set to  500.000000
7/4/2012	12:15:02 PM	H2 MFC set to  0.000000
7/4/2012	12:15:02 PM	BCl3 MFC set to  0.000000
7/4/2012	12:15:02 PM	PH3 MFC set to  0.000000
7/4/2012	12:15:02 PM	SiCl4 MFC set to  0.000000
7/4/2012	12:15:02 PM	Bypass solenoid MFC set to  0.000000
7/4/2012	12:15:02 PM	Tube furnace set to 0
7/4/2012	12:16:12 PM	Helium valve closed
7/4/2012	12:16:12 PM	H2 valve closed
7/4/2012	12:16:12 PM	BCl3 valve closed
7/4/2012	12:16:12 PM	PH3 valve closed
7/4/2012	12:16:12 PM	SiCl4 pre valve closed
7/4/2012	12:16:12 PM	SiCl4 post valve closed
7/4/2012	12:16:12 PM	Main Vac valve closed
7/4/2012	12:16:12 PM	Bypass valve closed
7/4/2012	12:16:12 PM	Bubbler valve closed
7/4/2012	12:16:12 PM	Helium MFC set to  0.000000
7/4/2012	12:16:12 PM	H2 MFC set to  0.000000
7/4/2012	12:16:12 PM	BCl3 MFC set to  0.000000
7/4/2012	12:16:12 PM	PH3 MFC set to  0.000000
7/4/2012	12:16:12 PM	SiCl4 MFC set to  0.000000
7/4/2012	12:16:12 PM	Bypass solenoid MFC set to  0.000000
7/4/2012	12:16:12 PM	Tube furnace set to 0
7/4/2012	12:16:13 PM	Run finished at 12:16 PM
7/4/2012	12:16:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/4/2012	12:18:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/4/2012	12:18:17 PM	Recipe started at 12:18 PM
7/4/2012	12:18:17 PM	Helium valve closed
7/4/2012	12:18:17 PM	H2 valve closed
7/4/2012	12:18:17 PM	BCl3 valve closed
7/4/2012	12:18:17 PM	PH3 valve closed
7/4/2012	12:18:17 PM	SiCl4 pre valve closed
7/4/2012	12:18:17 PM	SiCl4 post valve closed
7/4/2012	12:18:17 PM	Main Vac valve closed
7/4/2012	12:18:17 PM	Bubbler valve closed
7/4/2012	12:18:17 PM	Bypass valve opened
7/4/2012	12:18:17 PM	Helium MFC set to  0.000000
7/4/2012	12:18:17 PM	H2 MFC set to  0.000000
7/4/2012	12:18:17 PM	BCl3 MFC set to  0.000000
7/4/2012	12:18:17 PM	PH3 MFC set to  0.000000
7/4/2012	12:18:17 PM	SiCl4 MFC set to  0.000000
7/4/2012	12:18:17 PM	Bypass solenoid MFC set to  0.000000
7/4/2012	12:18:17 PM	Tube furnace set to 0
7/4/2012	12:19:23 PM	Helium valve closed
7/4/2012	12:19:23 PM	H2 valve closed
7/4/2012	12:19:23 PM	BCl3 valve closed
7/4/2012	12:19:23 PM	PH3 valve closed
7/4/2012	12:19:23 PM	SiCl4 pre valve closed
7/4/2012	12:19:23 PM	SiCl4 post valve closed
7/4/2012	12:19:23 PM	Main Vac valve closed
7/4/2012	12:19:23 PM	Bubbler valve closed
7/4/2012	12:19:23 PM	Bypass valve opened
7/4/2012	12:19:23 PM	Helium MFC set to  0.000000
7/4/2012	12:19:23 PM	H2 MFC set to  0.000000
7/4/2012	12:19:23 PM	BCl3 MFC set to  0.000000
7/4/2012	12:19:23 PM	PH3 MFC set to  0.000000
7/4/2012	12:19:23 PM	SiCl4 MFC set to  0.000000
7/4/2012	12:19:23 PM	Bypass solenoid MFC set to  0.000000
7/4/2012	12:19:23 PM	Tube furnace set to 0
7/4/2012	12:20:23 PM	Helium valve closed
7/4/2012	12:20:23 PM	H2 valve closed
7/4/2012	12:20:23 PM	BCl3 valve closed
7/4/2012	12:20:23 PM	PH3 valve closed
7/4/2012	12:20:23 PM	SiCl4 pre valve closed
7/4/2012	12:20:23 PM	SiCl4 post valve closed
7/4/2012	12:20:23 PM	Bypass valve closed
7/4/2012	12:20:23 PM	Bubbler valve closed
7/4/2012	12:20:23 PM	Main Vac valve opened
7/4/2012	12:20:23 PM	Helium MFC set to  0.000000
7/4/2012	12:20:23 PM	H2 MFC set to  0.000000
7/4/2012	12:20:23 PM	BCl3 MFC set to  0.000000
7/4/2012	12:20:23 PM	PH3 MFC set to  0.000000
7/4/2012	12:20:23 PM	SiCl4 MFC set to  0.000000
7/4/2012	12:20:23 PM	Bypass solenoid MFC set to  0.000000
7/4/2012	12:20:23 PM	Tube furnace set to 0
7/4/2012	12:20:24 PM	Run finished at 12:20 PM
7/4/2012	12:20:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
